Inventor

BARTSCH CHRISTIN

DE7 patents

⚠️ This page may combine multiple inventors who share the name “BARTSCH CHRISTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO DEVICES INC

3 patents

US7259091B2Aug 21, 2007

Technique for forming a passivation layer prior to depositing a barrier layer in a copper metallization layer

ADVANCED MICRO DEVICES INC268 citations98

US7986040B2Jul 26, 2011

Method of reducing erosion of a metal cap layer during via patterning in semiconductor devices

ADVANCED MICRO DEVICES INC11 citations83

US7410885B2Aug 12, 2008

Method of reducing contamination by removing an interlayer dielectric from the substrate edge

ADVANCED MICRO DEVICES INC12 citations82

BARTSCH CHRISTIN

2 patents

US8664115B2Mar 4, 2014

Copper interconnect with metal hardmask removal

BARTSCH CHRISTIN2 citations50

US8338293B2Dec 25, 2012

Method of reducing erosion of a metal cap layer during via patterning in semiconductor devices

BARTSCH CHRISTIN0 citations47

FEUSTEL FRANK

1 patent

US8673087B2Mar 18, 2014

Reducing copper defects during a wet chemical cleaning of exposed copper surfaces in a metallization layer of a semiconductor device

FEUSTEL FRANK0 citations50

SCHALLER MATTHIAS

1 patent

US8423320B2Apr 16, 2013

Method and system for quantitative inline material characterization in semiconductor production processes based on structural measurements and related models

SCHALLER MATTHIAS0 citations39