Inventor · disambiguated record

Yun-Sen Lai

Also filed as: LAI YUN-SEN

2 granted patents·44 citations·filing 1999–2008

60Inventor score

Technology areasG05B H10W

Files withINOTERA MEMORIES INC1 NANYA TECHNOLOGY CORP1

Top patents by PatentIndex Score

2 records

0168US6225187B1Method for STI-top rounding controlNANYA TECHNOLOGY CORP·Filed 1999·Granted May 1, 2001·41 cites·14 claims
0256US7908024B2Method and system for detecting tool errors to stop a process recipe for a single chamberINOTERA MEMORIES INC·Filed 2008·Granted Mar 15, 2011·3 cites·12 claims

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