Inventor

LIU KUAN NAN

TW2 patents

⚠️ This page may combine multiple inventors who share the name “LIU KUAN NAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9583345B2Feb 28, 2017

Method for overcoming broken line and photoresist scum issues in tri-layer photoresist patterning

TAIWAN SEMICONDUCTOR MFG CO LTD417 citations96

TAIWAN SEMICONDUCTOR MFG

1 patent

US9159561B2Oct 13, 2015

Method for overcoming broken line and photoresist scum issues in tri-layer photoresist patterning

TAIWAN SEMICONDUCTOR MFG5 citations81