Inventor
ZHANG JU-BAO
SG5 patents
Patents
5 patentsUS10784185B2Sep 22, 2020
Method for manufacturing semiconductor device with through silicon via structure
UNITED MICROELECTRONICS CORP4 citations68
US10546801B2Jan 28, 2020
Semiconductor device with through silicon via structure and method for manufacturing the same
UNITED MICROELECTRONICS CORP1 citations68
US9922832B1Mar 20, 2018
Manufacturing method of semiconductor structure
UNITED MICROELECTRONICS CORP5 citations67
US11081427B2Aug 3, 2021
Semiconductor device with through silicon via structure
UNITED MICROELECTRONICS CORP0 citations58
US9524923B2Dec 20, 2016
Semiconductor structure and method for manufacturing the same
UNITED MICROELECTRONICS CORP0 citations47