Inventor

KIM DU RI

KR4 patents

Patents

4 patents

US12146710B2Nov 19, 2024

Substrate treating apparatus and substrate treating system comprising the same

SEMES CO LTD0 citations57

US12340983B2Jun 24, 2025

Apparatus for treating substrate and method for treating substrate

SEMES CO LTD0 citations50

US12451358B2Oct 21, 2025

Method for fabricating semiconductor device and apparatus for processing substrate using plasma

SEMES CO LTD0 citations47

US12463015B2Nov 4, 2025

Substrate processing apparatus and method using the plasma

SEMES CO LTD0 citations46