Inventor

MATSUOKA RYOICHI

JP51 patents

⚠️ This page may combine multiple inventors who share the name “MATSUOKA RYOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUOKA RYOICHI

HITACHI HIGH TECH CORP

Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus

Pattern measurement apparatus

Pattern displacement measuring method and pattern measuring device

Method and apparatus for creating imaging recipe

Method and apparatus of pattern inspection and semiconductor inspection system using the same

Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method

Scanning electron microscope and a method for imaging a specimen using the same

Pattern generating apparatus and pattern shape evaluating apparatus

Pattern shape evaluation method

Method, device and computer program of length measurement

Pattern inspection apparatus and semiconductor inspection system

System and method for detecting defects in a semiconductor during manufacturing thereof

Method and apparatus for evaluating pattern shape of a semiconductor device

Pattern measuring method and pattern measuring device

Overlay error measuring device and computer program

Pattern generating apparatus and pattern shape evaluating apparatus

Pattern generating apparatus and pattern shape evaluating apparatus

Pattern matching apparatus and semiconductor inspection system using the same

Semiconductor measurement apparatus and computer program

Pattern measurement method and pattern measurement system

Image evaluation apparatus and pattern shape evaluation apparatus

MIYAMOTO ATSUSHI

Method and device for synthesizing panorama image using scanning charged-particle microscope

Scanning electron microscope and a method for imaging a specimen using the same

Method and apparatus for creating imaging recipe

Scanning electron microscope and a method for imaging a specimen using the same

SEM system and a method for producing a recipe

Method and apparatus for creating imaging recipe

TOYODA YASUTAKA

Method and apparatus of pattern inspection and semiconductor inspection system using the same

Pattern generating apparatus and pattern shape evaluating apparatus

Method and apparatus of pattern inspection and semiconductor inspection system using the same

Image processing apparatus

Pattern shape evaluation method and pattern shape evaluation apparatus

MATSUOKA RYOICHI

Pattern measurement apparatus

Pattern measuring method and pattern measuring device

Image processing device and computer program for performing image processing

Pattern measurement apparatus

Method of creating template for matching, as well as device for creating template

SEIKO INSTR INC

Wafer inspecting apparatus

Method and apparatus of evaluating layer matching deviation based on CAD information

SUTANI TAKUMICHI

Pattern displacement measuring method and pattern measuring device

Pattern measuring method and pattern measuring device

SHINODA SHINICHI

Method and apparatus for image generation

Pattern inspection method, pattern inspection apparatus and pattern processing apparatus

HITACHI LTD

Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern

SATO HIDETOSHI

Pattern measurement methods and pattern measurement equipment

MOROKUMA HIDETOSHI

Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus

MITO HIROAKI

Method of extracting contour lines of image data obtained by means of charged particle beam device, and contour line extraction device

KOTAKI GO

Scanning electron microscope device and pattern dimension measuring method using same

SII NANOTECHNOLOGY INC

Method and apparatus of evaluating layer matching deviation based on CAD information

KIJIMA MIHOKO

Method for measuring sample and measurement device