Inventor

SUTANI TAKUMICHI

JP30 patents

⚠️ This page may combine multiple inventors who share the name “SUTANI TAKUMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUTANI TAKUMICHI

HITACHI HIGH TECH CORP

Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus

Pattern displacement measuring method and pattern measuring device

Method and apparatus for creating imaging recipe

Method and apparatus of pattern inspection and semiconductor inspection system using the same

Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method

Method, device and computer program of length measurement

Pattern inspection apparatus and semiconductor inspection system

System and method for detecting defects in a semiconductor during manufacturing thereof

Pattern measuring method and pattern measuring device

Pattern matching method and computer program for executing pattern matching

Pattern matching apparatus and semiconductor inspection system using the same

Pattern matching method and pattern matching program

Method and apparatus for inspecting defect of pattern formed on semiconductor device

Pattern measurement method and pattern measurement system

Image processor, method for generating pattern using self-organizing lithographic techniques and computer program

TOSHIBA KK

Focus monitoring method, exposure apparatus, and exposure mask

Photomask having a focus monitor pattern

TOYODA YASUTAKA

Method and apparatus of pattern inspection and semiconductor inspection system using the same

Method and apparatus of pattern inspection and semiconductor inspection system using the same

SUTANI TAKUMICHI

Pattern displacement measuring method and pattern measuring device

Pattern measuring method and pattern measuring device

MIYAMOTO ATSUSHI

Method and apparatus for creating imaging recipe

Method and apparatus for creating imaging recipe

HITACHI LTD

Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern

MOROKUMA HIDETOSHI

Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus

NISHIURA TOMOFUMI

Method and apparatus for inspecting defect of pattern formed on semiconductor device

TAGUCHI JUNICHI

Defect inspection device and defect inspection method for inspecting whether a product has defects

SUGIYAMA AKIYUKI

Pattern matching method and computer program for executing pattern matching

SATO HIDETOSHI

Electron microscope for inspecting dimension and shape of a pattern formed on a wafer

KIJIMA MIHOKO

Method of OPC model building, information-processing apparatus, and method of determining process conditions of semiconductor device