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Inventor
SCHULZ ERIC M
US
5 patents
⚠️ This page may combine multiple inventors who share the name “SCHULZ ERIC M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WU JIANHUI
2 patents
US8951099B2
Feb 10, 2015
Chemical mechanical polishing conditioner
WU JIANHUI
16 citations
82
US8905823B2
Dec 9, 2014
Corrosion-resistant CMP conditioning tools and methods for making and using same
WU JIANHUI
8 citations
79
SAINT GOBAIN ABRASIVES INC
2 patents
US8342910B2
Jan 1, 2013
Abrasive tool for use as a chemical mechanical planarization pad conditioner
SAINT GOBAIN ABRASIVES INC
8 citations
81
US7195549B2
Mar 27, 2007
Drum grinding wheel
SAINT GOBAIN ABRASIVES INC
7 citations
72
DINH-NGOC CHARLES
1 patent
US9022840B2
May 5, 2015
Abrasive tool for use as a chemical mechanical planarization pad conditioner
DINH-NGOC CHARLES
6 citations
76