Inventor
ZOTOV SERGEI A
US6 patents
⚠️ This page may combine multiple inventors who share the name “ZOTOV SERGEI A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
5 patentsUS8368154B2Feb 5, 2013
Three dimensional folded MEMS technology for multi-axis sensor systems
UNIV CALIFORNIA19 citations88
US9696340B2Jul 4, 2017
Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation
UNIV CALIFORNIA9 citations82
US9274136B2Mar 1, 2016
Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation
UNIV CALIFORNIA7 citations82
US10247554B2Apr 2, 2019
Fully balanced micro-machined inertial sensor
UNIV CALIFORNIA5 citations72
US9296133B2Mar 29, 2016
Method for batch fabrication of three-dimensional shells
UNIV CALIFORNIA2 citations61