Inventor
KIRCHHOFF MARKUS M
DE3 patents
Patents
3 patentsUS6096654AAug 1, 2000
Gapfill of semiconductor structure using doped silicate glasses
SIEMENS AG8 citations70
US6048475AApr 11, 2000
Gapfill of semiconductor structure using doped silicate glasses
SIEMENS AG7 citations70
US5866485AFeb 2, 1999
Techniques for etching a silicon dioxide-containing layer
SIEMENS AG8 citations67