Inventor
SOMEYA HIROSHI
JP22 patents
⚠️ This page may combine multiple inventors who share the name “SOMEYA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
11 patentsUS7923705B2Apr 12, 2011
Extreme ultra violet light source apparatus
GIGAPHOTON INC25 citations92
US8003962B2Aug 23, 2011
Extreme ultraviolet light source apparatus and nozzle protection device
GIGAPHOTON INC13 citations84
US9253866B2Feb 2, 2016
Gas lock device and extreme ultraviolet light generation apparatus
GIGAPHOTON INC7 citations82
US10485085B2Nov 19, 2019
Extreme ultraviolet light sensor unit and extreme ultraviolet light generation device
GIGAPHOTON INC1 citations61
US11428892B2Aug 30, 2022
Optical apparatus
GIGAPHOTON INC0 citations52
US11320740B2May 3, 2022
Target supply device, target supply method, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US9233782B2Jan 12, 2016
Target supply device
GIGAPHOTON INC0 citations52
US8804902B2Aug 12, 2014
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus
GIGAPHOTON INC0 citations52
US8779402B2Jul 15, 2014
Target supply device
GIGAPHOTON INC1 citations52
US9229192B2Jan 5, 2016
Mirror device
GIGAPHOTON INC1 citations51
US10481354B2Nov 19, 2019
Structure of connection between optical unit and optical path tube
GIGAPHOTON INC0 citations41
SOMEYA HIROSHI
4 patentsUS8445877B2May 21, 2013
Extreme ultraviolet light source apparatus and target supply device
SOMEYA HIROSHI3 citations61
US9046651B2Jun 2, 2015
Mirror device
SOMEYA HIROSHI2 citations60
US8477412B2Jul 2, 2013
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus
SOMEYA HIROSHI0 citations51
US8258492B2Sep 4, 2012
Differential evacuation system
SOMEYA HIROSHI1 citations51