Inventor
KREMERS MAARTEN FRANS JANUS
NL4 patents
Patents
4 patentsUS11315752B2Apr 26, 2022
E-beam apparatus
ASML NETHERLANDS BV2 citations70
US10867770B2Dec 15, 2020
E-beam apparatus
ASML NETHERLANDS BV2 citations70
US11131937B2Sep 28, 2021
Positioning device, stiffness reduction device and electron beam apparatus
ASML NETHERLANDS BV0 citations57
US11621142B2Apr 4, 2023
Substrate positioning device and electron beam inspection tool
ASML NETHERLANDS BV0 citations48