Inventor
SCHILLER NICOLAS
DE8 patents
⚠️ This page may combine multiple inventors who share the name “SCHILLER NICOLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
5 patentsUS5614248AMar 25, 1997
Method for plasma-assisted reactive electron beam vaporization
FRAUNHOFER GES FORSCHUNG43 citations90
US5750185AMay 12, 1998
Method for electron beam deposition of multicomponent evaporants
FRAUNHOFER GES FORSCHUNG9 citations72
US6130002AOct 10, 2000
Process for producing organically modified oxide, oxynitride or nitride layers by vacuum deposition
FRAUNHOFER GES FORSCHUNG14 citations71
US7541070B2Jun 2, 2009
Method of vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide
FRAUNHOFER GES FORSCHUNG2 citations54
US7803255B2Sep 28, 2010
Device for plasma-activated vapor coating of large surfaces
FRAUNHOFER GES FORSCHUNG1 citations47