Inventor

TANAKA TOSHIHIKO

JP182 patents

⚠️ This page may combine multiple inventors who share the name “TANAKA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TANAKA TOSHIHIKO

HITACHI LTD

Resist pattern forming method using anti-reflective layer, resist pattern formed, and method of etching using resist pattern and product formed

Mask having a phase shifter and method of manufacturing same

Method of and apparatus for detecting defect on photomask

Semiconductor memory device with recessed array region

Method of forming pattern and projection aligner for carrying out the same

Projection aligner and exposure method

Method of forming pattern and projection aligner for carrying out the same

Method of making a semiconductor memory device with recessed array region

Method of forming pattern and projection aligner for carrying out the same

Manufacturing method of photomask and photomask

Semiconductor device and method for patterning the semiconductor device in which line patterns terminate at different lengths to prevent the occurrence of a short or break

Mask having a phase shifter and method of manufacturing same

Method of pattern detection

Method of forming patterns

Electron device manufacturing method, a pattern forming method, and a photomask used for those methods

Semiconductor memory device having static random access memory

Photomask, the manufacturing method, a patterning method, and a semiconductor device manufacturing method

Method for manufacturing a semiconductor device using half-tone phase-shift mask to transfer a pattern onto a substrate

Semiconductor memory device with recessed array region

Photomask and method for manufacturing the same

Phase shift mask and manufacturing the same

RENESAS TECH CORP

Semiconductor device manufacturing method

Photomask, the manufacturing method, a patterning method, and a semiconductor device manufacturing method

Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the same

Fabrication method of semiconductor integrated circuit device and mask

Method for manufacturing an electronic device

MITSUBISHI ELECTRIC CORP

Method of making a field effect transistor

Field effect transistor including πconjugate polymer and liquid crystal display including the field effect transistor

Method of making a liquid crystal display including a field effect transistor

OLYMPUS OPTICAL CO

Defect inspection system

Defect inspection data processing system

Defect detecting apparatus

HITACHI METALS LTD

High-frequency switch module

Multilayered frequency separator

Magnetic core

MITSUBISHI CHEM CORP

Purine derivatives and medicaments comprising the same as active ingredient

3-phenylpyrrolidine derivatives

NTN TOYO BEARING CO LTD

Method of producing hydrodynamic type porous oil-impregnated bearing

Sintered oil-impregnated bearing and method for manufacturing same

SORTEC CORP

Resist patterns and method of forming resist patterns

Resist patterns and method of forming resist patterns

HITICHI LTD

Method of forming a pattern

TAKATA CORP

Inflatable seatbelt system

SANYO ELECTRIC CO

Liquid crystal display

KAYAMA RYOZO

Abnormality diagnostic device of internal combustion engine with turbocharger

JAPAN DISPLAY INC

Sensor-equipped display device and sensor device

DENSO CORP

Abnormality diagnosis apparatus for internal combustion engine

OLYMPUS CORP

Defect inspection device and substrate manufacturing system using the same

TOYOTA MOTOR CO LTD

Rapid catalyst warm-up control device for internal combustion engine

SUMITOMO HEAVY INDUSTRIES

Tire handling system