Inventor

CLAESSENS BERT JAN

BE3 patents

Patents

3 patents

US8508716B2Aug 13, 2013

Homogenizer

CLAESSENS BERT JAN5 citations69

US8432529B2Apr 30, 2013

Lithographic apparatus and monitoring method

CLAESSENS BERT JAN4 citations58

US8885144B2Nov 11, 2014

Illumination system and lithographic apparatus

CLAESSENS BERT JAN2 citations53