Inventor
KIM INSUNG
US15 patents
⚠️ This page may combine multiple inventors who share the name “KIM INSUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
11 patentsUS9857690B2Jan 2, 2018
Extreme ultraviolet generation device and exposure system including the same
SAMSUNG ELECTRONICS CO LTD6 citations82
US11700005B2Jul 11, 2023
Phase locked loop generating adaptive driving voltage and related operating method
SAMSUNG ELECTRONICS CO LTD4 citations70
US9642234B2May 2, 2017
EUV light generator apparatus having a droplet generator configured to control a droplet position using a magnetic field
SAMSUNG ELECTRONICS CO LTD2 citations70
US12185450B2Dec 31, 2024
Semiconductor manufacturing apparatus and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations61
US11979973B2May 7, 2024
Semiconductor manufacturing apparatus and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations61
US9078334B2Jul 7, 2015
Extreme ultraviolet light source devices
SAMSUNG ELECTRONICS CO LTD3 citations60
US11778719B2Oct 3, 2023
Laser beam delivery apparatus for extreme ultra violet light source
SAMSUNG ELECTRONICS CO LTD0 citations59
US10126642B2Nov 13, 2018
Reflective photomask, method of fabricating the same, and exposure apparatus using the reflective photomask
SAMSUNG ELECTRONICS CO LTD1 citations50
US12204389B2Jan 21, 2025
Regulator circuit, an electronic device including the regulator circuit, and a processor including the regulator circuit
SAMSUNG ELECTRONICS CO LTD0 citations48
US11830737B2Nov 28, 2023
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations46
US9996001B2Jun 12, 2018
Reticle and exposure apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations40