Inventor
KEHRBERG EDGAR
DE3 patents
Patents
3 patentsUS7129694B2Oct 31, 2006
Large substrate test system
APPLIED MATERIALS INC21 citations91
US7372250B2May 13, 2008
Methods and apparatus for determining a position of a substrate relative to a support stage
APPLIED MATERIALS INC7 citations72
US7075323B2Jul 11, 2006
Large substrate test system
APPLIED MATERIALS INC7 citations72