Inventor

LAEMER FRANZ

DE2 patents

Patents

2 patents

US6936902B2Aug 30, 2005

Sensor with at least one micromechanical structure and method for production thereof

BOSCH GMBH ROBERT34 citations91

US7273764B2Sep 25, 2007

Sensor with at least one micromechanical structure, and method for producing it

BOSCH GMBH ROBERT6 citations72