Inventor
SILVERSTEIN PAUL B
US4 patents
Patents
4 patentsUS9870893B2Jan 16, 2018
Multi-piece electrode aperture
AXCELIS TECH INC2 citations70
US10361069B2Jul 23, 2019
Ion source repeller shield comprising a labyrinth seal
AXCELIS TECH INC1 citations59
US10535498B2Jan 14, 2020
Lanthanated tungsten ion source and beamline components
AXCELIS TECH INC0 citations49
US9941087B2Apr 10, 2018
Ion source cathode shield
AXCELIS TECH INC0 citations49