Inventor
EATON ROBERT A
7 patents
⚠️ This page may combine multiple inventors who share the name “EATON ROBERT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
5 patentsUS6361646B1Mar 26, 2002
Method and apparatus for endpoint detection for chemical mechanical polishing
SPEEDFAM IPEC CORP185 citations96
US6106662AAug 22, 2000
Method and apparatus for endpoint detection for chemical mechanical polishing
SPEEDFAM IPEC CORP197 citations96
US6549279B2Apr 15, 2003
Method and apparatus for optical endpoint calibration in CMP
SPEEDFAM IPEC CORP37 citations92
US6395130B1May 28, 2002
Hydrophobic optical endpoint light pipes for chemical mechanical polishing
SPEEDFAM IPEC CORP51 citations91
US6641462B2Nov 4, 2003
Method and apparatus for distributing fluid to a polishing surface during chemical mechanical polishing
SPEEDFAM IPEC CORP7 citations72