P

Inventor

BAKLANOV MIKHAIL

BE14 patents
⚠️ This page may combine multiple inventors who share the name “BAKLANOV MIKHAIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMEC

4 patents
US8540890B2Sep 24, 2013

Protective treatment for porous materials

IMEC11 citations83
US8968864B2Mar 3, 2015

Sealed porous materials, methods for making them, and semiconductor devices comprising them

IMEC4 citations65
US7964039B2Jun 21, 2011

Cleaning of plasma chamber walls using noble gas cleaning step

IMEC3 citations59
US9492841B2Nov 15, 2016

Method for pore sealing of porous materials using polyimide langmuir-blodgett film

IMEC0 citations40

IMEC INTER UNI MICRO ELECTR

3 patents
US6593251B2Jul 15, 2003

Method to produce a porous oxygen-silicon layer

IMEC INTER UNI MICRO ELECTR29 citations91
US7458251B2Dec 2, 2008

Method for determining solvent permeability of films

IMEC INTER UNI MICRO ELECTR6 citations60
US7415902B2Aug 26, 2008

Method for the quantification of hydrophilic properties of porous materials

IMEC INTER UNI MICRO ELECTR0 citations43

IMEC VZW

2 patents
US9941151B2Apr 10, 2018

Method for producing an integrated circuit including a metallization layer comprising low K dielectric material

IMEC VZW2 citations72
US9117666B2Aug 25, 2015

Method for activating a porous layer surface

IMEC VZW5 citations68

TOKYO ELECTRON LTD

2 patents
US9859102B2Jan 2, 2018

Method of etching porous film

TOKYO ELECTRON LTD5 citations72
US10236162B2Mar 19, 2019

Method of etching porous film

TOKYO ELECTRON LTD0 citations51

APPLIED MATERIALS INC

1 patent
US9414445B2Aug 9, 2016

Method and apparatus for microwave treatment of dielectric films

APPLIED MATERIALS INC21 citations92

URBANOWICZ ADAM MICHAL

1 patent
US8158523B2Apr 17, 2012

Quantification of hydrophobic and hydrophilic properties of materials

URBANOWICZ ADAM MICHAL1 citations41

BAKLANOV MIKHAIL

1 patent
US8974870B2Mar 10, 2015

Fabrication of porogen residues free low-k materials with improved mechanical and chemical resistance

BAKLANOV MIKHAIL1 citations36