Inventor
RAMSEY W CHUCK
US3 patents
Patents
3 patentsUS5451258ASep 19, 1995
Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
MATERIALS RESEARCH CORP83 citations94
US5348587ASep 20, 1994
Apparatus for elimination of low temperature ammonia salts in TiCl4 NH3 CVD reaction
MATERIALS RESEARCH CORP49 citations93
US5271963ADec 21, 1993
Elimination of low temperature ammonia salt in TiCl4 NH3 CVD reaction
MATERIALS RESEARCH CORP59 citations93