Inventor

HSIEH JULIAN J

US3 patents

⚠️ This page may combine multiple inventors who share the name “HSIEH JULIAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HSIEH JULIAN J

1 patent

US8241991B2Aug 14, 2012

Method for forming interconnect structure having airgap

HSIEH JULIAN J522 citations96

IBM

1 patent

US5290358AMar 1, 1994

Apparatus for directional low pressure chemical vapor deposition (DLPCVD)

IBM65 citations94

NOVELLUS SYSTEMS INC

1 patent

US6403501B1Jun 11, 2002

Method of controlling FSG deposition rate in an HDP reactor

NOVELLUS SYSTEMS INC13 citations68