Inventor
TOMITA MASAHIKO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “TOMITA MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7354858B2Apr 8, 2008
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD2 citations63
US7981809B2Jul 19, 2011
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD4 citations62
US7229917B2Jun 12, 2007
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD3 citations60
US10312101B2Jun 4, 2019
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US9984892B2May 29, 2018
Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system
TOKYO ELECTRON LTD1 citations51
US10629446B2Apr 21, 2020
Substrate treatment method and substrate treatment apparatus
TOKYO ELECTRON LTD0 citations41
US10622205B2Apr 14, 2020
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations37