P

Inventor

PLUMHOFF JASON

US5 patents
⚠️ This page may combine multiple inventors who share the name “PLUMHOFF JASON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PLUMHOFF JASON

3 patents
US7867403B2Jan 11, 2011

Temperature control method for photolithographic substrate

PLUMHOFF JASON2 citations57
US7749400B2Jul 6, 2010

Method for etching photolithographic substrates

PLUMHOFF JASON0 citations42
US8187483B2May 29, 2012

Method to minimize CD etch bias

PLUMHOFF JASON0 citations37

UNAXIS USA INC

1 patent
US7008877B2Mar 7, 2006

Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias

UNAXIS USA INC2 citations60

OERLIKON USA INC

1 patent
US7625824B2Dec 1, 2009

Process change detection through the use of evolutionary algorithms

OERLIKON USA INC0 citations38