Inventor
VAN DER SIJS ARIE JOHAN
NL5 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER SIJS ARIE JOHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7586108B2Sep 8, 2009
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
ASML NETHERLANDS BV56 citations94
US8013977B2Sep 6, 2011
Lithographic apparatus, radiation sensor and method of manufacturing a radiation sensor
ASML NETHERLANDS BV2 citations61
US7388652B2Jun 17, 2008
Wave front sensor with grey filter and lithographic apparatus comprising same
ASML NETHERLANDS BV2 citations61
NIHTIANOV STOYAN
2 patentsUS8138485B2Mar 20, 2012
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN35 citations86
US8426831B2Apr 23, 2013
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN6 citations78