Inventor
SCHUWER ANTONIUS ANDREAS JOHANNES
NL2 patents
Patents
2 patentsUS8138485B2Mar 20, 2012
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN35 citations86
US8426831B2Apr 23, 2013
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN6 citations78