Inventor

HUBBARD ALEX R

US3 patents

Patents

3 patents

US8900885B1Dec 2, 2014

Wafer bonding misalignment reduction

IBM22 citations91

US9184042B1Nov 10, 2015

Wafer backside particle mitigation

IBM2 citations61

US9318347B2Apr 19, 2016

Wafer backside particle mitigation

IBM0 citations51