Inventor

BALTUSSEN SANDER

NL6 patents

⚠️ This page may combine multiple inventors who share the name “BALTUSSEN SANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US10222701B2Mar 5, 2019

Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method

ASML NETHERLANDS BV11 citations78

US11703768B2Jul 18, 2023

Lithographic apparatus and related methods

ASML NETHERLANDS BV0 citations52

US12072620B2Aug 27, 2024

Method of manufacturing a membrane assembly

ASML NETHERLANDS BV0 citations48

MAPPER LITHOGRAPHY IP BV

2 patents

US8366423B2Feb 5, 2013

Method and arrangement for realizing a vacuum in a vacuum chamber

MAPPER LITHOGRAPHY IP BV3 citations58

US8857465B2Oct 14, 2014

Method and system for realizing a vacuum in a vacuum chamber

MAPPER LITHOGRAPHY IP BV1 citations48

BALTUSSEN SANDER

1 patent

US8690005B2Apr 8, 2014

Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber

BALTUSSEN SANDER2 citations50