Inventor
WÄHLISCH CHRISTIAN FELIX
NL2 patents
Patents
2 patentsUS10222701B2Mar 5, 2019
Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
ASML NETHERLANDS BV11 citations78
US10459342B2Oct 29, 2019
Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
ASML NETHERLANDS BV0 citations42