Inventor
KUDO TAKEHITO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KUDO TAKEHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
5 patentsUS7423731B2Sep 9, 2008
Illumination optical system, exposure apparatus, and exposure method with polarized switching device
NIKON CORP59 citations97
US7446858B2Nov 4, 2008
Exposure method and apparatus, and method for fabricating device
NIKON CORP51 citations95
US7515248B2Apr 7, 2009
Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustment
NIKON CORP25 citations92
US7515247B2Apr 7, 2009
Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting device
NIKON CORP2 citations62
US9678437B2Jun 13, 2017
Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
NIKON CORP0 citations51
KUDO TAKEHITO
3 patentsUS9146474B2Sep 29, 2015
Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger and different linear polarization states in an on-axis area and a plurality of off-axis areas
KUDO TAKEHITO8 citations82
US8675177B2Mar 18, 2014
Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in first and second pairs of areas
KUDO TAKEHITO5 citations82
US9164393B2Oct 20, 2015
Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areas
KUDO TAKEHITO0 citations50