Inventor
CHENG CHANG YUNG
TW3 patents
Patents
3 patentsUS7359759B2Apr 15, 2008
Method and system for virtual metrology in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG46 citations90
US7010382B2Mar 7, 2006
Method and system for improving process control for semiconductor manufacturing operations
TAIWAN SEMICONDUCTOR MFG18 citations75
US8041440B2Oct 18, 2011
Method and system for providing a selection of golden tools for better defect density and product yield
TAIWAN SEMICONDUCTOR MFG4 citations60