Inventor
GREENWOOD BENNETT
US2 patents
Patents
2 patentsUS9926398B2Mar 27, 2018
Composite particles and a process for making the same
CABOT CORP3 citations70
US9725621B2Aug 8, 2017
Chemical mechanical planarization slurry composition comprising composite particles, process for removing material using said composition, CMP polishing pad and process for preparing said composition
CABOT CORP3 citations70