Inventor
NEWNAM BRIAN E
3 patents
Patents
3 patentsUS5212588AMay 18, 1993
Reflective optical imaging system for extreme ultraviolet wavelengths
US ENERGY150 citations91
US4917447AApr 17, 1990
Extreme ultraviolet reflector
US ENERGY12 citations69
US3935545AJan 27, 1976
Method and apparatus for reducing diffraction-induced damage in high power laser amplifier systems
US ENERGY6 citations54