Inventor
FUNG CLIFFORD D
US11 patents
⚠️ This page may combine multiple inventors who share the name “FUNG CLIFFORD D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FOXBORO CO
8 patentsUS5969591AOct 19, 1999
Single-sided differential pressure sensor
FOXBORO CO68 citations95
US5220838AJun 22, 1993
Overpressure-protected, differential pressure sensor and method of making the same
FOXBORO CO62 citations93
US5672551ASep 30, 1997
Method for manufacturing a semiconductor pressure sensor with single-crystal silicon diaphragm and single-crystal gage elements
FOXBORO CO30 citations92
US5589810ADec 31, 1996
Semiconductor pressure sensor and related methodology with polysilicon diaphragm and single-crystal gage elements
FOXBORO CO33 citations92
US5681997AOct 28, 1997
Excitation of polysilicon based piezoresistive pressure sensors
FOXBORO CO40 citations90
US5438875AAug 8, 1995
Removing sacrificial material through temporary channels as a method of making an overpressure-protected differential pressure sensor
FOXBORO CO33 citations90
US5357808AOct 25, 1994
Overpressure-protected, differential pressure sensor
FOXBORO CO25 citations90
US5323656AJun 28, 1994
Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
FOXBORO CO19 citations81