Inventor
CHEN ZHEFEI JESSIE
US2 patents
Patents
2 patentsUS6492311B2Dec 10, 2002
Ethyenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal composition and process
EKC TECHNOLOGY INC18 citations89
US6367486B1Apr 9, 2002
Ethylenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal process
EKC TECHNOLOGY INC42 citations89