Inventor

MIDDENDORF DANIEL O

US2 patents

Patents

2 patents

US6446296B1Sep 10, 2002

Substrate cleaning apparatus with brush force control and method

RITE TRACK EQUIPMENT SERVICES18 citations85

US6572710B2Jun 3, 2003

Brush force control method for a substrate cleaning apparatus

RITE TRACK EQUIPMENT SERVICES13 citations77