Inventor
POKHARNA HIMANSU
US2 patents
Patents
2 patentsUS6528116B1Mar 4, 2003
Lid cooling mechanism and method for optimized deposition of low-k dielectric using tri methylsilane-ozone based processes
APPLIED MATERIALS INC15 citations90
US6899763B2May 31, 2005
Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes
APPLIED MATERIALS INC10 citations71