Inventor

HEFTY ROBERT C

US5 patents

⚠️ This page may combine multiple inventors who share the name “HEFTY ROBERT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US9234775B2Jan 12, 2016

Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber

LAM RES CORP6 citations72

DELGADINO GERARDO A

1 patent

US8394722B2Mar 12, 2013

Bi-layer, tri-layer mask CD control

DELGADINO GERARDO A6 citations68

JI BING

1 patent

US8236188B2Aug 7, 2012

Method for low-K dielectric etch with reduced damage

JI BING2 citations59

BLOCK MAYUMI

1 patent

US8114780B2Feb 14, 2012

Method for dielectric material removal between conductive lines

BLOCK MAYUMI0 citations41

LI SIYI

1 patent

US8906248B2Dec 9, 2014

Silicon on insulator etch

LI SIYI0 citations30