Inventor

BASSOM NEIL J

US26 patents

⚠️ This page may combine multiple inventors who share the name “BASSOM NEIL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BASSOM NEIL J

VARIAN SEMICONDUCTOR EQUIPMENT

Apparatus for dynamic temperature control of an ion source

Excited gas injection for ion implant control

Self-cleaning radio frequency plasma source

Cathode having electron production and focusing grooves, ion source and related method

Ion source cleaning end point detection

Cathode having electron production and focusing grooves, ion source and related method

Gas coupled arc chamber cooling

Method and apparatus for thermal control of ion sources and sputtering targets

Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Techniques for improving the performance and extending the lifetime of an ion source

Dynamic temperature control of an ion source

Ceramic ion source chamber

Ceramic ion source chamber

Coating insulating materials for improved life

FEI CO

Fabrication of high resistivity structures using focused ion beams

System for modifying small structures using localized charge transfer mechanism to remove or deposit material

Dummy copper deprocessing

AXCELIS TECH INC

Hydraulic feed system for an ion source

Hydraulic feed system for an ion source

High incidence angle graphite for particle control with dedicated low sputter yield ion beam

KOO BON-WOONG

Excited gas injection for ion implant control

LOW RUSSELL J

Flexible ion source

BILOIU COSTEL

Gallium ION source and materials therefore

GU GEORGE Y

System for modifying small structures

CHANEY CRAIG R

Cleaning of an extraction aperture of an ion source

PEREL ALEXANDER S

Technique for ion implanting a target