Inventor
PLATOW WILHELM P
US14 patents
⚠️ This page may combine multiple inventors who share the name “PLATOW WILHELM P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
7 patentsUS9142379B2Sep 22, 2015
Ion source and a method for in-situ cleaning thereof
VARIAN SEMICONDUCTOR EQUIPMENT7 citations83
US7888662B2Feb 15, 2011
Ion source cleaning method and apparatus
VARIAN SEMICONDUCTOR EQUIPMENT9 citations83
US8003959B2Aug 23, 2011
Ion source cleaning end point detection
VARIAN SEMICONDUCTOR EQUIPMENT4 citations62
US7767986B2Aug 3, 2010
Method and apparatus for controlling beam current uniformity in an ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT5 citations62
US8003956B2Aug 23, 2011
Method and apparatus for controlling beam current uniformity in an ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT3 citations60
US7413596B2Aug 19, 2008
Method and apparatus for the production of purified liquids and vapors
VARIAN SEMICONDUCTOR EQUIPMENT4 citations57
US7397049B2Jul 8, 2008
Determining ion beam parallelism using refraction method
VARIAN SEMICONDUCTOR EQUIPMENT0 citations46