Inventor
MIZUTANI TOMOYUKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MIZUTANI TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS10410840B2Sep 10, 2019
Gas supplying method and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD1 citations60
US9583315B2Feb 28, 2017
Plasma etching apparatus and plasma etching method
TOKYO ELECTRON LTD1 citations50
US9947510B2Apr 17, 2018
Method for supplying gas, and plasma processing apparatus
TOKYO ELECTRON LTD0 citations39