Inventor
DEKKERS JEROEN
NL12 patents
⚠️ This page may combine multiple inventors who share the name “DEKKERS JEROEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS10539886B2Jan 21, 2020
Pellicle attachment apparatus
ASML NETHERLANDS BV13 citations90
US10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US10168621B2Jan 1, 2019
Radiation beam apparatus
ASML NETHERLANDS BV2 citations72
US11009803B2May 18, 2021
Mask assembly
ASML NETHERLANDS BV0 citations60
US11003098B2May 11, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US10969701B2Apr 6, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US9606458B2Mar 28, 2017
Method for calibration of an encoder scale and a lithographic apparatus
ASML NETHERLANDS BV0 citations41