Inventor
RENKENS MICHAEL JOZEF MATHIJS
NL19 patents
⚠️ This page may combine multiple inventors who share the name “RENKENS MICHAEL JOZEF MATHIJS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS7102729B2Sep 5, 2006
Lithographic apparatus, measurement system, and device manufacturing method
ASML NETHERLANDS BV158 citations93
US7119886B2Oct 10, 2006
Lithographic apparatus, device manufacturing method, and angular encoder
ASML NETHERLANDS BV19 citations83
US10168621B2Jan 1, 2019
Radiation beam apparatus
ASML NETHERLANDS BV2 citations72
US11635696B2Apr 25, 2023
Imprint lithography
ASML NETHERLANDS BV1 citations71
US10580545B2Mar 3, 2020
Beam delivery apparatus and method
ASML NETHERLANDS BV6 citations70
US7554105B2Jun 30, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations70
US10216101B2Feb 26, 2019
Reflector
ASML NETHERLANDS BV1 citations62
US12147162B2Nov 19, 2024
Imprint lithography
ASML NETHERLANDS BV0 citations61
US10908510B2Feb 2, 2021
Imprint lithography
ASML NETHERLANDS BV0 citations61
US10890851B2Jan 12, 2021
Imprint lithography
ASML NETHERLANDS BV0 citations61
US10712678B2Jul 14, 2020
Imprint lithography apparatus and method
ASML NETHERLANDS BV0 citations51
US7426015B2Sep 16, 2008
Device manufacturing method and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US9606458B2Mar 28, 2017
Method for calibration of an encoder scale and a lithographic apparatus
ASML NETHERLANDS BV0 citations41
US9952513B2Apr 24, 2018
Undulator
ASML NETHERLANDS BV0 citations39