Inventor
SCHOORMANS CAROLUS JOHANNES CATHARINA
NL11 patents
⚠️ This page may combine multiple inventors who share the name “SCHOORMANS CAROLUS JOHANNES CATHARINA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS10401735B2Sep 3, 2019
Lithographic method and apparatus
ASML NETHERLANDS BV2 citations71
US10444635B2Oct 15, 2019
Lithographic method and apparatus
ASML NETHERLANDS BV1 citations59
US7684011B2Mar 23, 2010
Calibration method for a lithographic apparatus
ASML NETHERLANDS BV2 citations58
US7557903B2Jul 7, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations57
US10712678B2Jul 14, 2020
Imprint lithography apparatus and method
ASML NETHERLANDS BV0 citations51
US10747120B2Aug 18, 2020
Lithographic method and apparatus
ASML NETHERLANDS BV0 citations50
US11619886B2Apr 4, 2023
Position measurement system, interferometer system and lithographic apparatus
ASML NETHERLANDS BV0 citations47
US11940264B2Mar 26, 2024
Mirror calibrating method, a position measuring method, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations41
US9606458B2Mar 28, 2017
Method for calibration of an encoder scale and a lithographic apparatus
ASML NETHERLANDS BV0 citations41
US10088756B2Oct 2, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations36