Inventor
CHUNG BU-CHIN
TW8 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG BU-CHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HERMES-EPITEK CORP
4 patentsUS9551569B2Jan 24, 2017
Apparatus and method for curvature and thin film stress measurement
HERMES-EPITEK CORP3 citations67
US9613875B2Apr 4, 2017
Method and system for manufacturing semiconductor epitaxy structure
HERMES-EPITEK CORP1 citations48
US9406536B1Aug 2, 2016
Method and system for manufacturing semiconductor epitaxy structure
HERMES-EPITEK CORP1 citations48
US9617636B2Apr 11, 2017
System and method for controlling wafer and thin film surface temperature
HERMES-EPITEK CORP1 citations47