Inventor
YABU TAKAYUKI
JP53 patents
⚠️ This page may combine multiple inventors who share the name “YABU TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
32 patentsUS7923705B2Apr 12, 2011
Extreme ultra violet light source apparatus
GIGAPHOTON INC25 citations92
US10303061B2May 28, 2019
Extreme ultraviolet light generation device
GIGAPHOTON INC5 citations73
US10225918B2Mar 5, 2019
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC3 citations73
US10085334B2Sep 25, 2018
Extreme ultraviolet light generating system
GIGAPHOTON INC3 citations73
US10271414B2Apr 23, 2019
Droplet detector and extreme ultraviolet light generating apparatus
GIGAPHOTON INC2 citations72
US10172224B2Jan 1, 2019
Extreme UV light generator
GIGAPHOTON INC2 citations72
US10141186B2Nov 27, 2018
Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system
GIGAPHOTON INC2 citations72
US10057972B2Aug 21, 2018
Extreme ultraviolet light generation system and method of generating extreme ultraviolet light
GIGAPHOTON INC5 citations72
US10102938B2Oct 16, 2018
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC5 citations70
US10225917B2Mar 5, 2019
Target supply device and extreme ultraviolet light generating device
GIGAPHOTON INC2 citations68
US10842010B2Nov 17, 2020
Extreme ultraviolet light generation system
GIGAPHOTON INC1 citations63
US8343429B2Jan 1, 2013
Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the same
GIGAPHOTON INC3 citations63
US11553583B2Jan 10, 2023
Extreme ultraviolet light generation system and electronic device manufacturing method
GIGAPHOTON INC0 citations62
US10609803B2Mar 31, 2020
Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV light
GIGAPHOTON INC1 citations62
US10531551B2Jan 7, 2020
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC1 citations62
US11778721B2Oct 3, 2023
Extreme ultraviolet light generation system and electronic device manufacturing method
GIGAPHOTON INC0 citations60
US12332575B2Jun 17, 2025
Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US11043784B2Jun 22, 2021
Laser apparatus and EUV light generation system
GIGAPHOTON INC0 citations52
US10908429B2Feb 2, 2021
Extreme ultraviolet light generation system, laser beam size controlling method, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US10869378B2Dec 15, 2020
Target measuring apparatus and extreme ultraviolet light generation apparatus
GIGAPHOTON INC0 citations52
US10054861B2Aug 21, 2018
Extreme ultraviolet light generating apparatus and method for generating extreme ultraviolet light
GIGAPHOTON INC1 citations52
US9949354B2Apr 17, 2018
Extreme UV light generation apparatus and method
GIGAPHOTON INC1 citations52
US9661730B2May 23, 2017
Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target
GIGAPHOTON INC1 citations52
US9097434B2Aug 4, 2015
Target supply apparatus and target supply method
GIGAPHOTON INC0 citations52
US8841639B2Sep 23, 2014
Control method for target supply device, and target supply device
GIGAPHOTON INC1 citations52
US8779402B2Jul 15, 2014
Target supply device
GIGAPHOTON INC1 citations52
US11219116B1Jan 4, 2022
Extreme ultraviolet light generation system and electronic device manufacturing method
GIGAPHOTON INC0 citations51
US11924954B2Mar 5, 2024
Extreme ultraviolet light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC0 citations50
US10531550B2Jan 7, 2020
Extreme ultraviolet light generation device
GIGAPHOTON INC0 citations42
US10191381B2Jan 29, 2019
Extreme ultraviolet light generating device
GIGAPHOTON INC0 citations42
US9686845B2Jun 20, 2017
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC0 citations42
US9439276B2Sep 6, 2016
Extreme ultraviolet light generating system
GIGAPHOTON INC0 citations42
KOMATSU MFG CO LTD
8 patentsUS6810061B2Oct 26, 2004
Discharge electrode and discharge electrode manufacturing method
KOMATSU MFG CO LTD32 citations92
US7903700B2Mar 8, 2011
Narrow-spectrum laser device
KOMATSU MFG CO LTD17 citations84
US6570899B1May 27, 2003
Gas laser device
KOMATSU MFG CO LTD12 citations73
US7732794B2Jun 8, 2010
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD6 citations63
US7683355B2Mar 23, 2010
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD4 citations63
US6771685B1Aug 3, 2004
Discharge electrodes connecting structure for laser apparatus and laser apparatus therewith
KOMATSU MFG CO LTD4 citations62
US7006546B2Feb 28, 2006
Gas laser electrode, laser chamber employing the electrode, and gas laser device
KOMATSU MFG CO LTD0 citations52
US6490310B1Dec 3, 2002
Laser discharge electrodes with current return plate structure
KOMATSU MFG CO LTD1 citations52
YABU TAKAYUKI
5 patentsUS8497489B2Jul 30, 2013
Chamber apparatus and method of maintaining target supply unit
YABU TAKAYUKI16 citations83
US8610095B2Dec 17, 2013
Extreme ultraviolet light source device
YABU TAKAYUKI12 citations82
US8604451B2Dec 10, 2013
Target supply apparatus
YABU TAKAYUKI10 citations82
US8698112B2Apr 15, 2014
Extreme ultraviolet light generation apparatus
YABU TAKAYUKI5 citations72
US8809819B2Aug 19, 2014
Target supply unit and extreme ultraviolet light generation apparatus
YABU TAKAYUKI0 citations51
MORIYA MASATO
2 patentsABE TAMOTSU
1 patentISHIHARA TAKANOBU
1 patentMIZOGUCHI HAKARU
1 patentShowing the top 50 of 53 patents by PatentIndex Score.