Inventor
YOO DONG-SU
KR4 patents
Patents
4 patentsUS9779996B2Oct 3, 2017
Integrated circuit devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations70
US9922879B2Mar 20, 2018
Integrated circuit devices
SAMSUNG ELECTRONICS CO LTD1 citations49
US9698021B2Jul 4, 2017
Deposition methods of forming a layer while rotating the substrate in angular increments and methods of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US9755026B2Sep 5, 2017
Method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations37