Inventor
OHASHI KATSUKI
JP3 patents
Patents
3 patentsUS7070889B2Jul 4, 2006
Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device
TOSHIBA KK6 citations72
US6849363B2Feb 1, 2005
Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device
TOSHIBA KK10 citations72
US7378201B2May 27, 2008
Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device
TOSHIBA KK1 citations61