P

Inventor

LE GOUIL ANNE

US4 patents
⚠️ This page may combine multiple inventors who share the name “LE GOUIL ANNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents
US9230825B2Jan 5, 2016

Method of tungsten etching

LAM RES CORP2 citations60
US11270890B2Mar 8, 2022

Etching carbon layer using doped carbon as a hard mask

LAM RES CORP0 citations50
USRE47650EOct 15, 2019

Method of tungsten etching

LAM RES CORP0 citations50

LE GOUIL ANNE

1 patent
US8598040B2Dec 3, 2013

ETCH process for 3D flash structures

LE GOUIL ANNE14 citations73